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Issue Date Title / Author(s) / CitationFile
2004

Cho, Sung Ki; Kim, Soo-Kil; Han, Hee; Kim, Jae Jeong; Oh, Seung Mo

J. Vac. Sci. Technol. B 22, 2649 (2004)

DOI
2004

Han, Hee; Kim, Jae Jeong; Yoon, Do Young

Journal of Vacuum Science and Technology a Vacuum Surfaces and Films 22(4), 1120-1123

DOI
1

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