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Analysis of stress distribution in piezoelectric MEMS energy harvester using shaped cantilever structure

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Authors
Park, Jung-Hyun; Kang, Junsuk; Ahn, Hosang; Kim, Seon-Bae; Liu, Dan; Kim, Dong-Joo
Issue Date
2010-12
Publisher
Taylor & Francis
Citation
Ferroelectrics, vol.409, pp. 55-61
Keywords
Energy harvesting자연과학MEMSstrain distributiontrapezoid
Abstract
Much interest in energy harvesters has been focused on maintaining their conversion efficiency during scaling down via the micromachining process. The piezoelectric PZTbased MEMS energy harvester was designed and fabricated to increase the fraction of the material strained during deflection since the geometric change of the cantilever shape can change the strain distribution on the beam and improve the output power. The generated power during beam deflection was separately collected from individual electrodes located at different positions of the cantilever, and they had good agreement with the strain estimation from finite element analysis. The trapezoidal shape showed 39% higher power than that of rectangular one.
ISSN
0015-0193
Language
English
URI
http://hdl.handle.net/10371/117508
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College of Agriculture and Life Sciences (농업생명과학대학)Dept. of Landscape Architecture and Rural System Engineering (생태조경·지역시스템공학부)Journal Papers (저널논문_생태조경·지역시스템공학부)
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