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Plasma characteristics for various driving RF frequencies of inductively coupled plasma
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- Authors
- Advisor
- 황용석
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- 유도결합플라즈마 ; Inductively coupled plasma ; 전자 가열 효율 ; Coupling Efficiency ; E-H 변이 ; E-H transition ; 플라즈마 특성 ; Plasma Characteristics ; Threshold 전자밀도 ; Threshold density ; Bulk 및 High tail 전자 ; Bulk and high tail electron
- Description
- Thesis(master`s)--서울대학교 대학원 :원자핵공학과,2006.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000047446
https://hdl.handle.net/10371/12278
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