Fabrication of Multiscale Patterns via Serial Imprinting with the Hierarchical Molds

Abstract

Multiscale patterning process is a technique which can be achieved from both the micro- and nanoscale patterns. Recently, the multiscale patterns have been utilized across a variety of research fields. In particular, multiscale patterning technique, which could fabricate patterns on the same plane regardless of scale, shape, height and depth of patterns, is one of emerging issues in the research area with polymers. Existing patterning techniques were suitable for fabricating monoscale patterns, however, which have been limited to fabricate multiscale patterns on the same plane because of the essential utilization of the etching or developing process. Here, we present a new type of multiscale patterning technique via serial imprinting with hierarchical molds. The hierarchical molds, which were made of ultraviolet (UV)-curable polymer resins, were composed of microscale bottom part and micro/nanoscale top part. These structures enabled to fabricate multiscale patterns on specific area on the same plane by serial imprinting, which was possible because of enough height and width of these structures. In the method, multiscale patterns were generated on the same plane regardless of scale, shape, height and depth of patterns. In addition, the multiscale patterns simply generated on flat and complex surfaces by using the developed patterning technique.