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Study on fabrication and improvement of resonance dynamics of microcantilever sensors actuated by piezoelectric PZT thick films for bio chip application : PZT 후막으로 구동되는 바이오칩용 미세감지 캔틸레버센서의 제조와 민감도 향상에 대한 연구
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- Authors
- Advisor
- 김환
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- PZT ; cantilever ; 캔틸레버 ; resonance ; MEMS ; sensitivity ; 바이오칩 ; PZT ; 공진 ; thick film ; Sensitivity ; Bio-MEMS ; 기공률 ; porosity ; 구동력 ; force
- Description
- Thesis(doctor`s)--서울대학교 대학원 :재료공학부 무기재료공학전공,2006.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000048705
https://hdl.handle.net/10371/12608
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