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Studies on asperity contact evolution of the micro-electro-mechanical systems (MEMS) switches : 초미세 전자기계 시스템 (MEMS) 스위치에서의 미세 돌기간 접촉점의 이볼루션에 대한 연구
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- Authors
- Advisor
- 윤종규
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- MEMS 스위치 ; MEMS switch ; 돌기접촉 ; asperity contact ; 접촉저항 ; contact resistance ; 일렉트로마이그레이션 ; electromigration ; phase field model ; phase field model ; 줄열 ; Joule heating
- Description
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2005.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052253
https://hdl.handle.net/10371/12681
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