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(A)Study on the formation of PZTZT thin films and fabrication of devices for FET type FRAM : FET 형식의 강유전체 메모리 소자를 위한 PZTZT 박막의 형성 및 소자 제작에 관한 연구
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- Authors
- Advisor
- 주승기
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- PZT ; Pzt ; ZT ; Zt ; 강유전체 ; Ferroelectric ; 비휘발성 기억소자 ; Non-volatile memory device ; FRAM ; Fram ; FET ; Fet ; MFIS ; Mfis ; memory window ; Memory window ; SOI ; Soi ; SOG ; Sog
- Description
- Thesis (doctoral)--서울대학교 대학원 :재료공학부,2004.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000053911
https://hdl.handle.net/10371/12794
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