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Growth and characterization of high-k SrTiO₃thin films grown by atomic layer deposition : 원자층 증착법을 이용한 고유전 SrTiO₃박막의 성장과 특성 분석
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- Authors
- Advisor
- 황철성
- Issue Date
- 2009
- Publisher
- 서울대학교 대학원
- Keywords
- SrTiO3 ; SrTiO3 ; 고유전체 ; high-k ; 원자층 증착법 ; Atomic layer deposition (ALD) ; seed layer ; seed layer ; 결정화 ; crystallization ; 누설 전류 ; leakage current ; 산화제 ; oxidant ; 물 ; H2O ; 오존 ; O3 ; 단차 피복성 ; step coverage ; 디램 ; DRAM ; 커패시터 ; capacitor
- Description
- Thesis(doctors) --서울대학교 대학원 :재료공학부,2009.2.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000035983
https://hdl.handle.net/10371/13195
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