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(A) study on electrical contact behavior and reliability of metal thin-film contacts for RF MEMS switches : RF MEMS 스위치를 위한 금속 박막 접촉의 전기적 접촉 거동 및 신뢰성 연구
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- Authors
- Advisor
- 주영창
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- RF MEMS 스위치 ; electrical contact ; 접촉 금속 박막 ; RF MEMS switch ; 접촉 저항 ; contact resistance ; 신뢰성 ; contact force ; reliability ; gold ; platinum ; iridium ; piezoelectric actuator
- Description
- Thesis(doctors) --서울대학교 대학원 :재료공학부,2008.8.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000041531
https://hdl.handle.net/10371/13203
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