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구리배선형성용 연마슬러리에 사용되는 부식방지제 및 공정 연구

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Authors

이종원

Advisor
김재정
Issue Date
2005
Publisher
서울대학교 대학원
Keywords
구리배선형성metallization금속화공정slurry슬러리corrosion부식방지제inhibitor벤조트리아졸CMP아미노테트라졸BTA부식ATRA침하erosion디싱dishing버핑.buffing
Description
학위논문(석사)--서울대학교 대학원 :화학생물공학부,2005.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000052920

https://hdl.handle.net/10371/13372
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