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Effect of UV treatment on silsesquioxane-based films
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- Authors
- Advisor
- 차국헌
- Issue Date
- 2006
- Publisher
- 서울대학교 대학원
- Keywords
- 실세스퀴옥세인 ; silsesquioxane ; 저유전 물질 ; low-k ; 나노기공박막 ; nanoporous films ; 자외선 ; UV ; 패터닝 ; patterning
- Description
- Thesis(master`s)--서울대학교 대학원 :화학생물공학부,2006.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000047849
https://hdl.handle.net/10371/13480
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