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Silicide induced lateral crystallization : 실리사이드에 의한 측면 결정화에 관한 연구
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- Authors
- Advisor
- 주승기
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 금속유도측면결정화 (MILC) ; metal-induced lateral crystallization (MILC) ; 다결정질 실리콘 (poly-Si) ; polycrystalline silicon (poly-Si) ; 박막 트랜지스터 (thin film transistor ; thin film transistor (TFT) ; TFT) ; silicide seed ; 실리사이드 씨앗 (silicide seed) ; Pd ; 팔라듐 (Pd) ; tensile stress effect ; 인장 응력 효과 (tensile stress effect)
- Description
- Thesis(doctors)--서울대학교 대학원 :재료공학부,2008.2.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000039481
https://hdl.handle.net/10371/13535
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