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(A)Study on structure improvements of MILC Poly-Si TFTs : 금속유도측면결정화에 의한 저온 다결정 실리콘 박막 트랜지스터의 구조 향상에 관한 연구
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- Authors
- Advisor
- 주승기
- Issue Date
- 2008
- Publisher
- 서울대학교 대학원
- Keywords
- 금속유도측면결정화법 ; metal-induced lateral crystallization (MILC) ; 다결정 실리콘 ; polycrystalline silicon ; 박막 트랜지스터 ; thin-film transistor (TFT) ; 누설전류 ; leakage current ; sub gate ; sub gate ; raised source ; raised source ; drain ; drain ; interface state ; interface state ; island corner effect ; island corner effect
- Description
- Thesis(doctors)--서울대학교 대학원 :재료공학부,2008.2.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000039476
https://hdl.handle.net/10371/13541
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