S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)
Deposition behaviors of Ru thin films prepared by chemical vapor deposition and their application to the electrodes of the DRAM devices
- Issue Date
- 서울대학교 대학원
- Ru; Ru; 유기금속화학증착; MOCVD; Pt-doped Ru; Pt-doped Ru; Ru; Ru; TiN; TiN; 결정립성장; grain growth; 열적안정성; thermal stability
- Thesis(doctoral)--서울대학교 대학원 :재료공학부,2004.
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