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R.F. 마그테트론 스퍼터링법을 이용한 TiO₂, ZnO 박막 증착 및 가스 감응 특성 연구 : Deposition and gas sensing property of TiO₂, ZnO thin films prepared by R.F. Magnetron Sputtering
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- Authors
- Advisor
- 홍성현
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- TiO2 박막 ; TiO2 thin film ; ZnO 박막 ; ZnO ; H2 센서 ; H2 sensor ; CO 센서 ; CO sensor ; R.F. 마그네트론 스퍼터링법 ; R.F. magnetron sputtering ; 사파이어 기판 ; sapphire substrate
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2005.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000051046
https://hdl.handle.net/10371/14307
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