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스퍼터링 방법으로 증착한 (Ba,Sr)TiO₃박막의 전기적 성질에 미치는 잔류응력과 박막두께 효과에 대한 연구
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- Authors
- Advisor
- 황철성
- Issue Date
- 2004
- Publisher
- 서울대학교 대학원
- Keywords
- BST ; BST ; sputter ; sputter ; compressive stress ; compressive stress ; electrical properties ; electrical properties ; size effect ; size effect ; Curie-Weiss behavior ; Curie-Weiss behavior
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2004.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000056115
https://hdl.handle.net/10371/14359
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