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R.F. 마그네트론 스퍼터링에 의한 TiO₂박막 증착 및 특성
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- Authors
- Advisor
- 홍성현
- Issue Date
- 2003
- Publisher
- 서울대학교 대학원
- Keywords
- 스퍼터링 ; Sputtering ; TiO2 박막 ; TiO₂ thin film ; 미세구조 ; Microstructure ; CO gas ; CO gas ; Sensor ; Sensor
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2003.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000057664
https://hdl.handle.net/10371/14674
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