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Sol-gel법으로 제조한 seed layer위에 sputtering법으로 증착한 PZT박막의 방향성 조정에 관한 연구

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Authors
김상욱
Advisor
김현이
Issue Date
2003
Publisher
서울대학교 대학원
Keywords
압전PZTSeed layerSol-gelSputterOrientationDeposition rateLead zirconium titanateThin film
Description
학위논문(석사)--서울대학교 대학원 :재료공학부,2003.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000057786

http://hdl.handle.net/10371/14688
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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