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MILC거동에 Ion mass doping이 미치는 영향에 관한 연구 : (A)Study on Ion mass doping effect on the MILC behaviors
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- Authors
- Advisor
- 주승기
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- 금속유도 측면 결정화(metal induced lateral crystallization ; metal induced lateral crystallization(MILC) ; MILC) ; dopant ; 도펀드(dopant) ; ion mass doping(IMD) ; 이온질량주입(IMD) ; actication ; activation ; poly-Si TFT ; 다결정 박막트랜지스터(poly-Si TFT)
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2007.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000045733
https://hdl.handle.net/10371/14867
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