Publications

Detailed Information

알루미늄 박막에서의 캐핑 층이 힐락 형성에 미치는 영향 평가 : Effect of capping layer on hillock formation in Al thin films

Cited 0 time in Web of Science Cited 0 time in Scopus
Authors

장광호

Advisor
주영창
Issue Date
2007
Publisher
서울대학교 대학원
Keywords
힐락. 캐핑 층Al film알루미늄Hillock박막Capping layerThin film
Description
학위논문(석사) --서울대학교 대학원 :재료공학부,2007.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000043719

https://hdl.handle.net/10371/15079
Files in This Item:
There are no files associated with this item.
Appears in Collections:

Altmetrics

Item View & Download Count

  • mendeley

Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.

Share