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알루미늄 박막에서의 캐핑 층이 힐락 형성에 미치는 영향 평가
Effect of capping layer on hillock formation in Al thin films

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Authors
장광호
Advisor
주영창
Issue Date
2007
Publisher
서울대학교 대학원
Keywords
힐락. 캐핑 층Al film알루미늄Hillock박막Capping layerThin film
Description
학위논문(석사) --서울대학교 대학원 :재료공학부,2007.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000043719

http://hdl.handle.net/10371/15079
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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