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(A)Study of artifacts generated during TEM sample preparation using Ion Milling and focused lon Beam : 이온 밀러 및 집속 이온 빔을 이용하여 TEM 시편 제조시 발생하는 결함에 관한 연구
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- Authors
- Advisor
- 김영운
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- 투과전자현미경 ; TEM (Transmission Electron Microscopy) ; 이온밀링 ; Temperature ; 집속이온빔 ; Ion milling ; 온도 ; Sample Preparation ; TEM 시편준비법 ; FIB(Focused Ion beam) ; 플라즈마 클리너 ; Plasma Cleaner
- Description
- 학위논문(석사) --서울대학교 대학원 :재료공학부,2007.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000043708
https://hdl.handle.net/10371/15132
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