FET-type Biosensor for Detecting Upside-Down Bonded DNA

Abstract

As not only interest in health care, but also the potential threat of bioterrorism increases, a great concern and need are focused on biosensor which can detect bio-agents quickly and accurately. Plus, biosensors should be able to detect bio-agents in the atmosphere or in the solution. The final goal of the development of biosensors should be commercialization and personalization of the device so that every people can access easily and purchase it at low price. And those can essentially serve as highly efficient devices. A biosensor is a sensing device literally. It is consisted of a sensing part and transducer part. Briefly speaking, bio-molecules are attached to sensing part of the device and that gives some electrical, chemical or physical changes. The changes are converted to some signals. It could be optical or electrical signals. In this thesis, I present the biosensor which use CMOS compatible technology. The sensor which has newly suggested structure is verified with simulation tool SILVACO first, and then device fabrication method and results are to be shown. Fabrication steps are specifically mentioned. Finally, sensor characteristics as a transistor itself and a number of make-ups are studied.