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Role of the plasma in dewetting of the thin metal film : 금속 박막의 dewtting 현상에 미치는 플라즈마의 역할에 관한 연구

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Authors

한동훈

Advisor
이정중
Major
재료공학부
Issue Date
2011-02
Publisher
서울대학교 대학원
Keywords
dewetting플라즈마금속열처리plasmametalannealing
Description
학위논문 (박사)-- 서울대학교 대학원 : 재료공학부, 2011.2. 이정중.
Language
eng
URI
https://hdl.handle.net/10371/158955

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