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Pulsed laser deposition 법으로 증착한 비정질 (In, Sn)-Ga-Zn-O 박막의 전기 및 광학적 특성 변화 연구 : Study of Electrical & Optical Properties for amorphous (In, Sn)-Ga-Zn-O Thin Films by PLD
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- Authors
- Advisor
- 박찬
- Major
- 재료공학부
- Issue Date
- 2011-02
- Publisher
- 서울대학교 대학원
- Keywords
- Amorphous Oxide Semiconductor ; In-Ga-Zn-O ; IGZO ; SGZO ; TTFT
- Description
- 학위논문 (석사)-- 서울대학교 대학원 : 재료공학부, 2011.2. 박찬.
- Language
- kor
- URI
- https://hdl.handle.net/10371/159475
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000029761
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