S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Chemical and Biological Engineering (화학생물공학부) Chemical Convergence for Energy and Environment (에너지환경 화학융합기술전공) Journal Papers (저널논문_에너지환경 화학융합기술전공)
Complementary metal oxide silicon integrated circuits incorporating monolithically integrated stretchable wavy interconnects
- Kim, Dae-Hyeong; Choi, Won Mook; Ahn, Jong-Hyun; Kim, Hoon-Sik; Song, Jizhou; Huang, Yonggang; Liu, Zhuangjian; Lu, Chun; Koh, Chan Ghee; Rogers, John A.
- Issue Date
- Applied Physics Letters, Vol.93 No.4, p. 044102
- Stretchable complementary metal oxide silicon circuits consisting of ultrathin active devices mechanically and electrically connected by narrow metal lines and polymer bridging structures are presented. This layout-together with designs that locate the neutral mechanical plane near the critical circuit layers-yields strain independent electrical performance and realistic paths to circuit integration. A typical implementation reduces the strain in the silicon to less than ∼0.04% for applied strains of ∼10%. Mechanical and electrical modeling and experimental characterization reveal the underlying physics of these systems. © 2008 American Institute of Physics.
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