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Synthesis and characterization of poly(silsesquioxane)s for nanoporous low-dielectric and low-refractive-index films : 나노 기공을 포함한 저 유전 및 저 굴절률 박막으로 응용 가능한 실세스퀴옥산 고분자의 합성 및 분석
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- Authors
- Advisor
- 윤도영
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- 폴리메틸실세스퀴옥산 ; silsesquioxane ; 저유전박막 ; PMSSQ ; 나노포러스 ; Thin Film ; GPLDI-TOF MS ; low-dielectric ; X-ray porosimetry ; porogen ; PALS ; nanoporous ; Nanoindenter ; GPLDI-TOF ; X-ray reflectivity ; X-ray porosimetry ; PALS ; nanoindenter
- Description
- Thesis(doctoral)--서울대학교 대학원 :화학부 고분자화학전공,2005.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000049948
https://hdl.handle.net/10371/19346
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