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Detailed Information
CVD 방법으로 증착한 HfO₂박막의 성장 기구와 전기적 성질에 관한 고찰
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- Authors
- Advisor
- 황철성
- Issue Date
- 2002
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2002.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000061394
https://hdl.handle.net/10371/30378
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