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공진진동수 분석을 통한 MEMS용 Si 소재의 손상도 및 미세파손 분석

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Authors
김재석
Advisor
권동일
Issue Date
2001
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :재료공학부,2001.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000065044

http://hdl.handle.net/10371/30418
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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