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공진진동수 분석을 통한 MEMS용 Si 소재의 손상도 및 미세파손 분석
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- Authors
- Advisor
- 권동일
- Issue Date
- 2001
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2001.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000065044
https://hdl.handle.net/10371/30418
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