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유도 결합 플라즈마를 이용한 마그네트론 스퍼터링법에 의해 제조된 (Ti,Cr)N 박막의 기계적 특성 평가

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Authors
정동하
Advisor
이정중
Issue Date
2001
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :재료공학부,2001.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000064798

http://hdl.handle.net/10371/30459
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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