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플라즈마 화학 증착법으로 제조된 Ti[1-x]Al[x]N 박막의 열처리에 따른 특성 평가
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- Authors
- Advisor
- 이정중
- Issue Date
- 2001
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :재료공학부,2001.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000064788
https://hdl.handle.net/10371/30469
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