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플라즈마 화학 증착법으로 제조된 Ti[1-x]Al[x]N 박막의 열처리에 따른 특성 평가

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Authors
이승훈
Advisor
이정중
Issue Date
2001
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :재료공학부,2001.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000064788

http://hdl.handle.net/10371/30469
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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