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PECVD법에 의한 Ti(B, N) 박막의 증착 및 특성에 관한 연구
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- Authors
- Advisor
- 이후철
- Issue Date
- 1999
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :금속공학과,1999.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000072181
https://hdl.handle.net/10371/30680
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