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PECVD법에 의한 Ti(B, N) 박막의 증착 및 특성에 관한 연구

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Authors
정용환
Advisor
이후철
Issue Date
1999
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :금속공학과,1999.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000072181

http://hdl.handle.net/10371/30680
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Master's Degree_재료공학부)
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