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A Study on the improvement of grain microstructure and device characteristics of polycrystalline silicon thin film transistor employing excimer laser annealing : 多結晶 실리콘 薄膜 素子의 그레인 微細 構造 및 特性 向上을 위한 엑시머 레이저 어닐링 方法에 關한 硏究
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 한민구 | - |
| dc.contributor.author | 김천홍 | - |
| dc.date.accessioned | 2010-01-15T04:14:38Z | - |
| dc.date.available | 2010-01-15T04:14:38Z | - |
| dc.date.copyright | 2002. | - |
| dc.date.issued | 2002 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000061144 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/30710 | - |
| dc.description | Thesis (doctoral)--서울대학교 대학원 :전기·컴퓨터공학부,2002. | en |
| dc.format.extent | xi, 130 leaves | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | polycrystalline silicon thin film transistor (poly-Si TFT) | en |
| dc.subject | 다결정 실리콘 박막 트랜지스터 | en |
| dc.subject | excimer laser annealing (ELA) | en |
| dc.subject | 엑시머 레이저 어닐링 | en |
| dc.subject | grain microstructure | en |
| dc.subject | 그레인 미세 구조 | en |
| dc.subject | field effect mobility | en |
| dc.subject | 전계 효과 이동도 | en |
| dc.subject | laser doping | en |
| dc.subject | 도핑 | en |
| dc.title | A Study on the improvement of grain microstructure and device characteristics of polycrystalline silicon thin film transistor employing excimer laser annealing | en |
| dc.title.alternative | 多結晶 실리콘 薄膜 素子의 그레인 微細 構造 및 特性 向上을 위한 엑시머 레이저 어닐링 方法에 關한 硏究 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 전기·컴퓨터공학부 | - |
| dc.description.degree | Doctor | en |
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