Publications
Detailed Information
A Micromachined and non-vacuum packaged silicon vibratory gyroscope : 미세 가공 기술로 제작된 비진공 실장형 실리콘 진동 각속도계
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 김용권
- Issue Date
- 2002
- Publisher
- 서울대학교 대학원
- Keywords
- 미세 가공 기술 ; micromachining ; 비진공 실장형 ; non-vacuum packaged gyroscope ; 실리콘 진동 각속도계 ; small damping ; 낮은 공기 감쇠 ; silicon snd glass bonded wafer ; 단결정 실리콘 ; silicon deep RIE
- Description
- Thesis (doctoral)--서울대학교 대학원 :전기·컴퓨터공학부,2002.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000061109
https://hdl.handle.net/10371/30711
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.