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Modeling and simulation of charging effects in electron beam lithography : 전자빔 리소그래피에서의 전하축적효과 모델링과 시뮬레이션
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 전국진 | - |
| dc.contributor.author | 이용재 | - |
| dc.date.accessioned | 2010-01-15T04:18:13Z | - |
| dc.date.available | 2010-01-15T04:18:13Z | - |
| dc.date.copyright | 2001. | - |
| dc.date.issued | 2001 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000063421 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/30797 | - |
| dc.description | Thesis (doctoral)--서울대학교 대학원 :전기.컴퓨터공학부,2001. | en |
| dc.format.extent | xi, 151 p. | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | SCALPEL | en |
| dc.subject | 전자빔리소그래피 | en |
| dc.subject | beam deflection | en |
| dc.subject | 전하축적효과 | en |
| dc.subject | pattern distortion | en |
| dc.subject | 몬테카를로 시뮬레이션 | en |
| dc.subject | numerical method | en |
| dc.subject | 수치해석 | en |
| dc.subject | EBIC | en |
| dc.subject | 빔 굴절 | en |
| dc.title | Modeling and simulation of charging effects in electron beam lithography | en |
| dc.title.alternative | 전자빔 리소그래피에서의 전하축적효과 모델링과 시뮬레이션 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 전기.컴퓨터공학부 | - |
| dc.description.degree | Doctor | en |
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