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공기 절연 적층형 인덕터를 위용한 AIGaAsInGaAs Pseudomorphic HEMT MMIC 제작에 관한 연구 : A Study on the fabrication of AIGaASInGaAs Pseudomorphic HEMT MMIC using air-gap stacked inductor
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- Authors
- Advisor
- 서광석
- Issue Date
- 1999
- Publisher
- 서울대학교 대학원
- Keywords
- 초고주파 집적회로 ; MMIC ; HEMT ; air-gap stacked inductor ; 공기 절연 적층혁 인덕터 ; electron-beam ; 전자빔 리소그래피 ; lithography ; T-게이트 ; T-gate
- Description
- 학위논문(박사)--서울대학교 대학원 :전자공학과,1999.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000071136
https://hdl.handle.net/10371/30811
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