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Study on process dependence of contact resistance : 공정 조건에 따른 콘택 저항에 관한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이종덕 | - |
| dc.contributor.author | 허연철 | - |
| dc.date.accessioned | 2010-01-15T04:22:26Z | - |
| dc.date.available | 2010-01-15T04:22:26Z | - |
| dc.date.copyright | 2000. | - |
| dc.date.issued | 2000 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000069730 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/30903 | - |
| dc.description | Thesis (doctoral)--서울대학교 대학원 :전기공학부,2000. | en |
| dc.format.extent | iv, 95 p. | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.subject | 콘택 저항 | en |
| dc.subject | Contact Resistance | en |
| dc.subject | 식각 선택비 | en |
| dc.subject | Etch Selectivity | en |
| dc.subject | 복합 이온주입 | en |
| dc.subject | Mixed Ion Implantation | en |
| dc.subject | 콘택 플러그 이온주입 | en |
| dc.subject | Contact Plug Ion Implantation | en |
| dc.subject | 기판 손실량 | en |
| dc.subject | Substrate Loss | en |
| dc.title | Study on process dependence of contact resistance | en |
| dc.title.alternative | 공정 조건에 따른 콘택 저항에 관한 연구 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 전기공학부 | - |
| dc.description.degree | Doctor | en |
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