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위상 및 방향 변조를 위한 초소형 광 변조기에 관한 연구 : A Study on the micromachined spatial light modulator for phase and amplitude modulation
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- Authors
- Advisor
- 김용권
- Issue Date
- 2000
- Publisher
- 서울대학교 대학원
- Keywords
- 초소형 광 변조기 ; Spatial light modulator(SLM) ; 적응 광학 ; Adaptive optics ; double crab leg spring ; Surface micromachining technology ; 표면 미세 가공 기술 ; Sacrificial layer ; 희생층
- Description
- 학위논문(박사)--서울대학교 대학원 :전기공학부,2000.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000069177
https://hdl.handle.net/10371/30904
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