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다중 빔 전자선 노광 장치를 위한 초소형 열-전계 방출 팁에 관한 연구
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- Authors
- Advisor
- 전국진
- Issue Date
- 2002
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :전기·컴퓨터공학부,2002.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000061657
https://hdl.handle.net/10371/31238
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