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A Study on uniformity improvement of plasma density in large-area helicon plasma source : 대면적 헬리콘 플라즈마 원에서 플라즈마 밀도의 균일성 향상에 관한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 황용석 | - |
| dc.contributor.author | 최윤호 | - |
| dc.date.accessioned | 2010-01-15T09:42:13Z | - |
| dc.date.available | 2010-01-15T09:42:13Z | - |
| dc.date.copyright | 2001. | - |
| dc.date.issued | 2001 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000064372 | eng |
| dc.identifier.uri | https://hdl.handle.net/10371/33222 | - |
| dc.description | Thesis (master`s)--서울대학교 대학원 :원자핵공학과,2001. | en |
| dc.format.extent | vi, 67 leaves | en |
| dc.language.iso | en | en |
| dc.publisher | 서울대학교 대학원 | en |
| dc.title | A Study on uniformity improvement of plasma density in large-area helicon plasma source | en |
| dc.title.alternative | 대면적 헬리콘 플라즈마 원에서 플라즈마 밀도의 균일성 향상에 관한 연구 | - |
| dc.type | Thesis | - |
| dc.contributor.department | 원자핵공학과 | - |
| dc.description.degree | Master | en |
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