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정전기력 가속에 의한 Mirror 소자의 전기적, 광학적 분석을 통한 미세역학적 신뢰성 평가 : Evaluation of reliability for micro mirror device through applying accelerated electrostatic force
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- Authors
- Advisor
- 권동일
- Issue Date
- 1999
- Publisher
- 서울대학교 대학원
- Keywords
- 마이크로머시닝 ; Mirror Devices ; 환형미러소자 ; Fatigue effect ; 정전기력 ; Accelerated condition ; 가속실험 ; DVD/CD Module ; C-V 측정 ; folded region
- Description
- 학위논문(박사)--서울대학교 대학원 :금속공학과,1999.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000074132
https://hdl.handle.net/10371/34585
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