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(Ba,Sr)TiO₃박막의 전기적 특성 향상을 위한 2-단계 증착 공정
A Two-step properties of (Ba,Sr)TiO₃thin films

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Authors
길덕신
Advisor
주승기
Issue Date
1999
Publisher
서울대학교 대학원
Keywords
DRAMDielectric film유전박막Sputtering스퍼터링2-step process2단계 증착법Seed layer씨앗층
Description
학위논문(박사)--서울대학교 대학원 :금속공학과,1999.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000071446

http://hdl.handle.net/10371/34593
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Material Science and Engineering (재료공학부) Theses (Ph.D. / Sc.D._재료공학부)
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