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(Ba,Sr)TiO₃박막의 전기적 특성 향상을 위한 2-단계 증착 공정 : A Two-step properties of (Ba,Sr)TiO₃thin films
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- Authors
- Advisor
- 주승기
- Issue Date
- 1999
- Publisher
- 서울대학교 대학원
- Keywords
- DRAM ; Dielectric film ; 유전박막 ; Sputtering ; 스퍼터링 ; 2-step process ; 2단계 증착법 ; Seed layer ; 씨앗층
- Description
- 학위논문(박사)--서울대학교 대학원 :금속공학과,1999.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000071446
https://hdl.handle.net/10371/34593
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