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(Ba,Sr)TiO₃박막의 전기적 특성 향상을 위한 2-단계 증착 공정 : A Two-step properties of (Ba,Sr)TiO₃thin films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 주승기 | - |
| dc.contributor.author | 길덕신 | - |
| dc.date.accessioned | 2010-01-16T13:54:49Z | - |
| dc.date.available | 2010-01-16T13:54:49Z | - |
| dc.date.copyright | 1999. | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000071446 | kor |
| dc.identifier.uri | https://hdl.handle.net/10371/34593 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :금속공학과,1999. | ko |
| dc.format.extent | xii, 121 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | DRAM | ko |
| dc.subject | Dielectric film | ko |
| dc.subject | 유전박막 | ko |
| dc.subject | Sputtering | ko |
| dc.subject | 스퍼터링 | ko |
| dc.subject | 2-step process | ko |
| dc.subject | 2단계 증착법 | ko |
| dc.subject | Seed layer | ko |
| dc.subject | 씨앗층 | ko |
| dc.title | (Ba,Sr)TiO₃박막의 전기적 특성 향상을 위한 2-단계 증착 공정 | ko |
| dc.title.alternative | A Two-step properties of (Ba,Sr)TiO₃thin films | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 금속공학과 | - |
| dc.description.degree | Doctor | ko |
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