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볼스크류-압전소자 구동기와 3자유도 이중서보제어기술을 이용한 초정밀 위치결정 시스템 개발
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- Authors
- Advisor
- 박희재
- Issue Date
- 2000
- Publisher
- 서울대학교 대학원
- Description
- 학위논문(석사)--서울대학교 대학원 :기계설계학과,2000.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000070693
https://hdl.handle.net/10371/34788
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