Material characterizations and microfailure properties of thin film structure through design and fabrication of electrostatically actuated test device
미세평가소자 설계제작을 통한 마이크로시스템 응용 박막구조물의 미소물성 및 파손특성 평가

Cited 0 time in webofscience Cited 0 time in scopus
  • mendeley

Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.