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Formation of Si₁-xGex quantum dot for the application to single electron devices : 단일 전자 소자용 Si₁-xGex 양자점 형성
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- Authors
- Advisor
- 김기범
- Issue Date
- 2002
- Publisher
- 서울대학교 대학원
- Keywords
- quantum dot ; 양자점 ; single electron memory device ; 단일 전자 메모리 소자 ; low-pressure chemical vapor deposition ; 저압 화학 기상 중착법 ; microstructure evolution ; 박막성장 ; oxidation ; 산화공정
- Description
- Thesis (doctoral)--서울대학교 대학원 :재료공학부,2002.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000060858
https://hdl.handle.net/10371/35433
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