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백금박막의 우성배향성 조절과 거대 입성장에 관한 연구 : The Study on the preferred orientation control and the giant grain growth of Pt films
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- Authors
- Advisor
- 윤의준
- Issue Date
- 2001
- Publisher
- 서울대학교 대학원
- Keywords
- 백금박막 ; Platinum thin film ; 우선배향성 ; preferred orientation ; 스퍼터링 ; sputtering ; 거대 입성장 ; giant grain growth ; 아르곤+산소
- Description
- 학위논문(박사)--서울대학교 대학원 :재료공학부,2001.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000063458
https://hdl.handle.net/10371/35508
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