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미세구조물을 위한 알루미늄 박막의 잔류응력과 응력기울기에 대한 연구

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Authors

김윤진

Advisor
김용권
Issue Date
1999
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :전기공학부,1999.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000072292

https://hdl.handle.net/10371/35556
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