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몸체 미세 가공 기술을 이용한 비틀림형 실리콘 가속도계의 제작

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Authors
석선호
Advisor
전국진
Issue Date
1999
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :전기공학부,1999.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000072450

http://hdl.handle.net/10371/36652
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Master's Degree_전기·정보공학부)
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