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Etch-back 공정을 이용한 다결정 실리콘 양자점 형성과 이를 이용한 단전자 트랜지스터

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Authors
강권칠
Advisor
박병국
Issue Date
2006
Publisher
서울대학교 대학원
Keywords
양자점quantum dot단전자트랜지스터etch-back processSET
Description
학위논문(석사)--서울대학교 대학원 :협동과정 나노과학기술전공, 2006.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000047278

http://hdl.handle.net/10371/43551
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College of Engineering/Engineering Practice School (공과대학/대학원)Nano-Science and Technology (협동과정 나노과학·기술전공)Theses (Master's Degree_협동과정 나노과학·기술전공)
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