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알루미늄 마이크로 다리의 stress 측정 : Stress measurement of Al microbridges
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- Authors
- Advisor
- 차국린
- Issue Date
- 2005
- Publisher
- 서울대학교 대학원
- Keywords
- 알루미늄 ; Aluminum ; 고유진동수 ; resonance frequency ; intrinsic stress ; intrinsic stress ; MEMS ; MEMS
- Description
- 학위논문(석사)--서울대학교 대학원 :협동과정 나노과학기술전공,2005.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000050836
https://hdl.handle.net/10371/43557
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